Modification of sputter deposited solid-state electrolyte thin films

Chiu, K.-F.K.-F.ChiuChen, C.C.C.C.ChenLin, K.M.K.M.LinLin, H.C.H.C.LinLo, C.C.C.C.LoHo, W.H.W.H.HoHSIN-CHIH LIN2012-10-242018-06-282012-10-242018-06-282010https://www.scopus.com/record/display.uri?eid=2-s2.0-78049444591&origin=resultslist&sort=plf-f&cite=2-s2.0-78049444591&src=s&imp=t&sid=ee501068c63e146fe6701522ed89c5fd&sot=cite&sdt=a&sl=0en-US[SDGs]SDG7Modification of sputter deposited solid-state electrolyte thin filmsjournal article10.1016/j.vacuum.2010.02.0062-s2.0-78049444591http://ntur.lib.ntu.edu.tw/bitstream/246246/243879/-1/323.pdf