BEOL TDDB reliability modeling and lifetime prediction using critical energy to breakdown.

Chen, Pin-ShiangPin-ShiangChenLee, Shou-ChungShou-ChungLeeOates, A. S.A. S.OatesCHEE-WEE LIU2020-06-162020-06-162018https://scholars.lib.ntu.edu.tw/handle/123456789/502114[SDGs]SDG7BEOL TDDB reliability modeling and lifetime prediction using critical energy to breakdown.conference paper10.1109/IRPS.2018.8353626https://doi.org/10.1109/IRPS.2018.8353626