Hong, ChitsungChitsungHongLI-AN CHULai, WeichengWeichengLaiChiang, Ann-ShynAnn-ShynChiangFang, WeileunWeileunFang2026-03-242026-03-242011https://www.scopus.com/inward/record.uri?eid=2-s2.0-80455137058&doi=10.1109%2FJSEN.2011.2160255&partnerID=40&md5=a359aa8d879e77eb443d2d54c810b225https://scholars.lib.ntu.edu.tw/handle/123456789/736666This study reports the implementation of a high-performance capacitive-type touch sensor by using the nanoporous anodic aluminum oxide (np-AAO) layer. The np-AAO layer is batch fabricated as the template to enable the direct formation of nanotexture metal film after deposition. The np-AAO is also exploited as the dielectric layer. Thus, the integration of np-AAO layer and the nanotexture metal film is employed to realize a metal-insulator-metal parallel-plate capacitance sensor. The sensitivity of the capacitive-type touch sensor is enhanced by the nanostructures. In application, the Au and Al metal layers and np-AAO are fabricated on Si substrate to form the parallel-plate capacitor. The testing demonstrates the np-AAO-based touch sensor has higher sensitivity. In addition, the detection of small object such as Drosophila using the fabricated np-AAO-based touch sensor is also demonstrated. © 2011 IEEE.capacitive sensornanocapacitornanotexture filmsnp-AAO (nanoporous anodic aluminum oxide)touch sensorjournal article10.1109/JSEN.2011.21602552-s2.0-80455137058