Improved growth of Ge quantum dots in Ge/Si stacked layers by pre-intermixing treatments

Lee, S.W.S.W.LeeChen, L.J.L.J.ChenChen, P.S.P.S.ChenTsai, M.-J.M.-J.TsaiLiu, C.W.C.W.LiuChen, W.Y.W.Y.ChenHsu, T.M.T.M.HsuCHEE-WEE LIU2020-06-162020-06-162004https://scholars.lib.ntu.edu.tw/handle/123456789/502089Improved growth of Ge quantum dots in Ge/Si stacked layers by pre-intermixing treatmentsconference paper10.1016/j.apsusc.2003.08.0982-s2.0-1142280319https://www.scopus.com/inward/record.uri?eid=2-s2.0-1142280319&doi=10.1016%2fj.apsusc.2003.08.098&partnerID=40&md5=4c009ccddd6f899579fa8e3a6ac63d1d