AlGaAs Surface Reconstruction after Cl 2 Chemical Etch and Ultra High Vacuum Anneal

MINGHWEI HONGMannaerts, JPJPMannaertsGrober, LHLHGroberThiel, FAFAThielFreund, RSRSFreund2018-09-102018-09-101994http://scholars.lib.ntu.edu.tw/handle/123456789/308666AlGaAs Surface Reconstruction after Cl 2 Chemical Etch and Ultra High Vacuum Annealjournal article