Photo-assisted local oxidation of GaN using an atomic force microscope

Hwang, J.S.J.S.HwangHu, Z.S.Z.S.HuLu, T.Y.T.Y.LuChen, L.W.L.W.ChenChen, S.W.S.W.ChenLin, T.Y.T.Y.LinHsiao, C.-L.C.-L.HsiaoChen, K.-H.K.-H.ChenChen, L.-C.L.-C.Chen2020-06-182020-06-18200609574484https://scholars.lib.ntu.edu.tw/handle/123456789/503399[SDGs]SDG9Photo-assisted local oxidation of GaN using an atomic force microscopejournal article10.1088/0957-4484/17/13/036