Su, M.-S.M.-S.SuTsai, K.-Y.K.-Y.TsaiLu, Y.-C.Y.-C.LuKuo, Y.-H.Y.-H.KuoPei, T.-H.T.-H.PeiYen, J.-Y.J.-Y.YenYI-CHANG LUKUEN-YU TSAIJIA-YUSH YEN2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77953313243&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356047Architecture for next generation massively parallel maskless lithography system (MPML2)conference paper10.1117/12.8464442-s2.0-77953313243