Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer

Chen, J.J.ChenLien, S.C.S.C.LienShin, Y.C.Y.C.ShinFeng, Zhe ChuanZhe ChuanFengKuan, C.H.C.H.KuanZhao, J.H.J.H.ZhaoLu, Wei JieWei JieLu2010-09-272018-07-052010-09-272018-07-052008http://ntur.lib.ntu.edu.tw//handle/246246/205554en-USOccurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Waferjournal article10.4028/www.scientific.net/MSF.600-603.39http://ntur.lib.ntu.edu.tw/bitstream/246246/205554/1/901.pdf