Yin, Y.-T.Y.-T.YinJiang, Y.-S.Y.-S.JiangLin, Y.-T.Y.-T.LinChang, T.-J.T.-J.ChangLin, H.-C.H.-C.LinChen, M.-J.M.-J.ChenHSIN-CHIH LINMIIN-JANG CHEN2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85089467600&partnerID=40&md5=28663a49806ab6e4db5c1c1d8718f0f6https://scholars.lib.ntu.edu.tw/handle/123456789/546678Enhancement of Dielectric Properties of Nanoscale HfO 2 Thin Films Via Atomic Layer Bombardmentjournal article10.1021/acsaelm.0c003882-s2.0-85089467600