A large-stroke MEMS deformable mirror fabricated by low-stress fluoropolymer membrane

Chen, T.-Y.T.-Y.ChenChiu, C.-W.E.C.-W.E.ChiuGUO-DUNG JOHN SU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-43449130122&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340732A large-stroke MEMS deformable mirror fabricated by low-stress fluoropolymer membranejournal article10.1109/LPT.2008.921134