Yeh, C.-T.C.-T.YehTuan, W.-H.W.-H.TuanWEI-HSING TUAN2020-05-122020-05-122017https://scholars.lib.ntu.edu.tw/handle/123456789/492151Oxidation mechanism of aluminum nitride revisitedjournal article10.1007/s40145-016-0213-12-s2.0-85008506968https://www.scopus.com/inward/record.uri?eid=2-s2.0-85008506968&doi=10.1007%2fs40145-016-0213-1&partnerID=40&md5=28318f8adecf4302a393c7b21a66d036