Chi, YunYunChiHsu, Peng-FuPeng-FuHsuLiu, Chao-ShiuanChao-ShiuanLiuChing, Wei-LiWei-LiChingChou, Tsung-YiTsung-YiChouCarty, Arthur J.Arthur J.CartyPeng, Shie-MingShie-MingPengLee, Gene-HsiangGene-HsiangLeeChuang, Shiow-HueyShiow-HueyChuang2009-09-282018-07-102009-09-282018-07-102002http://ntur.lib.ntu.edu.tw//handle/246246/168468application/pdf440666 bytesapplication/pdfen-USFluorinated aminoalkoxide CuII complexes: new CVD precursors for deposition of copper metaljournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/168468/1/299.pdf