Submicron-size patterning on the sapphire substrate prepared by nanosphere lithography and nanoimprint lithography techniques

Chang, C.-M.C.-M.ChangShiao, M.-H.M.-H.ShiaoChiang, D.D.ChiangYang, C.-T.C.-T.YangHuang, M.-J.M.-J.HuangHsueh, W.-J.W.-J.HsuehWEN-JENG HSUEH2020-01-172020-01-172013https://scholars.lib.ntu.edu.tw/handle/123456789/451910Submicron-size patterning on the sapphire substrate prepared by nanosphere lithography and nanoimprint lithography techniquesjournal article10.1007/s12540-013-4031-52-s2.0-84879954469https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879954469&doi=10.1007%2fs12540-013-4031-5&partnerID=40&md5=af9a623b70a2794777481f8ffc0320ac