Latest advances in nano- & micro-scale 3-D surface profilometric technologies for in-situ automated optical inspection (AOI)

Liang-Chia ChenLIANG-CHIA CHEN2021-10-142021-10-142014http://www.lmpmi2014.jp/program/https://scholars.lib.ntu.edu.tw/handle/123456789/584410Tsukaba, Japan.Latest advances in nano- & micro-scale 3-D surface profilometric technologies for in-situ automated optical inspection (AOI)conference paper