Hybrid servo design for large area nano pattern stitching

Yen, J.-Y.J.-Y.YenChen, C.-H.C.-H.ChenChen, L.-S.L.-S.ChenTsai, K.-Y.K.-Y.TsaiChang, S.-H.S.-H.ChangKUEN-YU TSAIJIA-YUSH YEN2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-70350451291&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/347227Hybrid servo design for large area nano pattern stitchingconference paper10.1109/AIM.2009.52298472-s2.0-70350451291