Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer

Chen, J.J.ChenLien, S. C.S. C.LienShin, Y. C.Y. C.ShinFeng, Z. C.Z. C.FengKuan, C. H.C. H.KuanZhao, J. H.J. H.ZhaoLu, W. J.W. J.Lu2009-03-112018-07-062009-03-112018-07-062008http://ntur.lib.ntu.edu.tw//handle/246246/144233en-USOccurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Waferjournal article