A fundamental modeling approach for nano-grinding of silicon wafers

Young, H.T.H.T.YoungHuang, H.-Y.H.-Y.HuangYang, Y.-J.Y.-J.YangHONG-TSU YOUNG2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-35348923540&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/322469A fundamental modeling approach for nano-grinding of silicon wafersbook