Dielectric elastomer micro actuator made in micromachining technology: Finite element modelling and deformation measurement

WEN-PIN SHIHSoulimane, S.S.SoulimanePinon, S.S.PinonShih, W-P.W-P.ShihCamon, H.H.Camon2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-84857168548&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/363642365502 bytesapplication/pdfDielectric elastomer micro actuator made in micromachining technology: Finite element modelling and deformation measurementconference paper10.1016/j.proeng.2011.12.119