Chen, Wen-ChungWen-ChungChenLin, Gong-RuGong-RuLinChang, C.-S.C.-S.ChangGONG-RU LIN2018-09-102018-09-101996http://www.scopus.com/inward/record.url?eid=2-s2.0-0030087455&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/323933Dynamics of thermal annealing in arsenic-ion-implanted GaAsjournal article