Tsai C.-PWEI-CHANG LI2022-11-162022-11-16202221601968https://www.scopus.com/inward/record.uri?eid=2-s2.0-85126391844&doi=10.1109%2fMEMS51670.2022.9699549&partnerID=40&md5=72a5ba937ad82dd79115faae40e59c3chttps://scholars.lib.ntu.edu.tw/handle/123456789/625173This work demonstrates, for the first time, frequency-to-pulse density modulation (PDM) functionality in micromechanical resoswitches based on the period doubling bifurcation mechanism. Unlike the previously demonstrated resoswitch-based squegging clock generator of [1] that operates at the squegging oscillation state (low-frequency ringing state), of which the squegging frequency is controlled by the contact structural or material stiffness, this work demonstrates much nonlinear rich dynamical switching behaviors controlled by the period-doubling (PD) bifurcation cascade along with the driving frequency at the tapping region, featuring various M/N impact/motion (M impacts among N motions) combinations. Implemented on a CMOS-MEMS folded-beam comb-driven resoswitch, the period-doubling bifurcation derived M/N impact/motion is directly transferred to a series of pulse trains with a density determined by the M/N ratio. This work not only verifies the nonlinear period-doubled operation in micromechanical resoswitches but also opens a new possibility of designing resoswitch-based communication receivers with more sophisticated modulation schemes based on the frequency controlled PDM in addition to FSK/OOK [2]. © 2022 IEEE.PDM; period-doubling bifurcation; pulse-width modulation; Resoswitch; vibro-Impacting resonatorBifurcation (mathematics); Clocks; Delta sigma modulation; Mechanics; MEMS; Voltage control; Bifurcation mechanisms; Clock generator; Micro-mechanical; Oscillation state; Period doubling bifurcation; Pulse density modulation; Pulsewidth modulations (PWM); Resoswitch; Time frequency; Vibro-impacting resonator; Pulse width modulationconference paper10.1109/MEMS51670.2022.96995492-s2.0-85126391844