Modeling, scheduling, and performance evaluation for wafer fabrication: a queueing colored Petri-net and GA-based approach

Chiang, Tsung-CheTsung-CheChiangHuang, An-ChihAn-ChihHuangFu, Li-ChenLi-ChenFu2009-02-252018-07-062009-02-252018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/141096application/pdf346323 bytesapplication/pdfen-USModeling, scheduling, and performance evaluation for wafer fabrication: a queueing colored Petri-net and GA-based approachjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/141096/1/30.pdf