A MEMS micromirror fabricated using CMOS post-process

Cheng, Ying-ChouYing-ChouChengDai, Ching-LiangChing-LiangDaiLee, Chi-YuanChi-YuanLeeChen, Ping-HeiPing-HeiChenChang, Pei-ZenPei-ZenChang2008-10-282018-06-282008-10-282018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/85693http://ntur.lib.ntu.edu.tw/bitstream/246246/85693/1/04.pdfapplication/pdf881077 bytesapplication/pdfen-USA MEMS micromirror fabricated using CMOS post-processjournal article10.1016/j.sna.2005.02.0092-s2.0-17644366794WOS:000229298200037http://ntur.lib.ntu.edu.tw/bitstream/246246/85693/1/04.pdf