Technological evolution and developing trend of in-situ AOI on macro-, micro- and nano-scale 3-D profilometric technologies

Liang-Chia ChenLIANG-CHIA CHEN2021-10-142021-10-142014http://www.eurekanetwork.org/showevent?p_r_p_564233524_articleId=4091029&p_r_p_564233524_groupId=10137https://scholars.lib.ntu.edu.tw/handle/123456789/5843982-6 June, Dubrovnik, Croatia.Technological evolution and developing trend of in-situ AOI on macro-, micro- and nano-scale 3-D profilometric technologiesconference paper