Lu T.R.Chen L.C.Chen K.H.Bhusari D.M.Chen T.M.Kuo C.T.LI-CHYONG CHEN2022-08-092022-08-09199800406090https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032476279&doi=10.1016%2fS0040-6090%2898%2901024-4&partnerID=40&md5=f7c5f1d3e295c9c1fb900b4b3a40774bhttps://scholars.lib.ntu.edu.tw/handle/123456789/616452In order to reduce the activation energy barrier for the formation of carbon nitride during ion beam sputtering, a novel bio-molecular target material, instead of the conventional graphite target, is successfully developed to deposit the crystalline carbon nitride films. The adenine target consists of a high N/C ratio as well as a 6-fold carbonitro-ring structure similar to that in the hypothetical C3N4. The mass spectrum of adenine indicates the existence of 11 main carbonitro-hydrogen containing species. Thus, the adenine target is anticipated to enhance the nucleation and growth of carbon nitride films by providing abundant carbonitro-hydrogen containing species as intermediate states. X-ray photoelectron spectrum analyses of these films indicated the presence of C and N in the films, with high nitrogen to carbon ratio at about 0.48. Both infrared and Raman spectroscopies confirm the chemical bonding between the carbon and nitrogen. X-ray and electron diffraction indicates the presence of crystalline carbon nitride in the film. © 1998 Elsevier Science S.A. All rights reserved.Bio-inorganic target;Carbon nitride;Ion beam sputtering;Mass spectrometryActivation energy;Carbon inorganic compounds;Ceramic coatings;Film growth;Ion beams;Ion bombardment;Mass spectrometry;Molecular structure;Nucleation;Sputter deposition;Targets;X ray photoelectron spectroscopy;Biomolecular targets;Carbon nitride;Ion beam sputtering;Protective coatingsjournal article10.1016/S0040-6090(98)01024-42-s2.0-0032476279