Examination of the Insulating Property of Ta205 in Al/Ta205/Si02/Si Capacitors from the Equivalent Low-Frequency Capacitance Behavior

胡振國Lin, S. T.S. T.LinHwu, Jenn-GwoJenn-GwoHwu2009-04-272018-07-062009-04-272018-07-061989http://ntur.lib.ntu.edu.tw//handle/246246/153901en-USExamination of the Insulating Property of Ta205 in Al/Ta205/Si02/Si Capacitors from the Equivalent Low-Frequency Capacitance Behaviorreport