Predictive formulae for OPC with applications to lithography-friendly routing.

Chen, Tai-ChenTai-ChenChenLiao, Guang-WanGuang-WanLiaoYAO-WEN CHANG2020-06-162020-06-162008https://scholars.lib.ntu.edu.tw/handle/123456789/501985[SDGs]SDG9Predictive formulae for OPC with applications to lithography-friendly routing.conference paper10.1145/1391469.1391599https://doi.org/10.1145/1391469.1391599