The detection and the control of machine/chamber mismatching in semiconductormanufacturing

Chouichi, A.A.ChouichiBlue, J.J.BlueYugma, C.C.YugmaPasqualini, F.F.PasqualiniJAKEY BLUE2020-03-022020-03-022019https://scholars.lib.ntu.edu.tw/handle/123456789/467293[SDGs]SDG9The detection and the control of machine/chamber mismatching in semiconductormanufacturingconference paper10.1109/WSC.2018.86324602-s2.0-85062635813https://www.scopus.com/inward/record.uri?eid=2-s2.0-85062635813&doi=10.1109%2fWSC.2018.8632460&partnerID=40&md5=897e4b1d8285bfba2ab9d2ad635c98a8