System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University

Lee, C. K.C. K.LeeWu, W. J.W. J.WuChang, P. Z.P. Z.ChangHuang, L. S.L. S.HuangLee, S. S.S. S.Lee2010-10-202018-06-292010-10-202018-06-292003-06http://ntur.lib.ntu.edu.tw//handle/246246/217982en-USSystem Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University