Self-reducible CuII source reagents for the CVD of copper

Hsu, P.-F.P.-F.HsuChi, Y.Y.ChiLin, T.-W.T.-W.LinLiu, C.-S.C.-S.LiuCarty, A.J.A.J.CartySHIE-MING PENG2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0003143523&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/292797Self-reducible CuII source reagents for the CVD of copperjournal article10.1002/1521-3862(200101)7:1<282-s2.0-0003143523