王晉億黃芝傑陳敏璋2021-03-292021-03-2920171029-502xhttps://www.AiritiLibrary.com/Publication/Index/1029502x-201709-201710230008-201710230008-2-7https://scholars.lib.ntu.edu.tw/handle/123456789/555619氮化處理與介面工程於高介電材料金氧半元件之探討journal article