A novel layout decomposition algorithm for triple patterning lithography

Fang, S.-Y.S.-Y.FangChang, Y.-W.Y.-W.ChangYAO-WEN CHANG2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84863544659&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372709A novel layout decomposition algorithm for triple patterning lithographyconference paper10.1145/2228360.22285792-s2.0-84863544659