MINGHWEI HONGKwo, Ray-NienRay-NienKwoPi, Tun-WenTun-WenPiHuang, Mao-LinMao-LinHuangChang, Yu-HsingYu-HsingChangChang, PenPenChangLin, Chun-AnChun-AnLinLin, Tsung-DaTsung-DaLin2018-09-102018-09-102014http://scholars.lib.ntu.edu.tw/handle/123456789/386505Method and system for manufacturing semiconductor devicejournal article