Superluminescent diodes with angled facet etched by chemically assisted ion beam etching

CHING-FUH LIN2018-09-102018-09-101991http://www.scopus.com/inward/record.url?eid=2-s2.0-0026157944&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293501Superluminescent diodes with angled facet etched by chemically assisted ion beam etchingjournal article