Edge-Etched Al<inf>2</inf>O<inf>3</inf>Dielectric as Charge Storage Region in a Coupled MIS Tunnel Diode Sensor

Chen, B.-J.B.-J.ChenJENN-GWO HWU2021-05-052021-05-052020https://www.scopus.com/inward/record.url?eid=2-s2.0-85089936480&partnerID=40&md5=eecf2999c3d39e9e4948b36fa0513627https://scholars.lib.ntu.edu.tw/handle/123456789/559029Edge-Etched Al<inf>2</inf>O<inf>3</inf>Dielectric as Charge Storage Region in a Coupled MIS Tunnel Diode Sensorjournal article10.1109/JEDS.2020.30119962-s2.0-85089936480WOS:000559512700012