Enhanced thermally induced stress effect on an ultrathin gate oxide

Su, J.-L.J.-L.SuHong, C.-C.C.-C.HongHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0037091888&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/296938Enhanced thermally induced stress effect on an ultrathin gate oxidejournal article10.1063/1.1452763