Comprehensive study on the deep depletion capacitance-voltage behavior for metal-oxide-semiconductor capacitor with ultrathin oxides

Cheng, J.-Y.J.-Y.ChengHuang, C.-T.C.-T.HuangHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-70350104993&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/347699Comprehensive study on the deep depletion capacitance-voltage behavior for metal-oxide-semiconductor capacitor with ultrathin oxidesjournal article10.1063/1.3226853