2024-05-182024-05-1809160https://scholars.lib.ntu.edu.tw/handle/123456789/717968MEMSBiochipsDiamond film waferNanotechnologyThermal and Fluid Control in MEMSand Packaging for optical devices and ICMEMSBiochipsDiamond film waferNanotechnologyThermal and Fluid Control in MEMSand Packaging for optical devices and IC