Fan, K.C.K.C.FanLin, C.Y.C.Y.LinShyu, L.H.L.H.Shyu2008-11-182018-06-282008-11-182018-06-281998http://ntur.lib.ntu.edu.tw//handle/246246/86552en-USPositional Error Compensation of a Precision Microstagejournal article