Enhanced nitrogen incorporation and improved breakdown endurance in nitrided gate oxides prepared by anodic oxidation followed by rapid thermal nitridation in N2O

Jeng, M.-J.M.-J.JengHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-101996http://www.scopus.com/inward/record.url?eid=2-s2.0-0000228733&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/321881Enhanced nitrogen incorporation and improved breakdown endurance in nitrided gate oxides prepared by anodic oxidation followed by rapid thermal nitridation in N2Ojournal article10.1063/1.117134