Influence of the mask magnification on imaging in hyper-NA lithography

Lin, Chun-HungChun-HungLinChen, Hsuen-LiHsuen-LiChenKo, Fu-HsiangFu-HsiangKo2008-12-312018-06-282008-12-312018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/95628https://www.scopus.com/inward/record.uri?eid=2-s2.0-34447253310&doi=10.1364%2fJOSAA.24.001633&partnerID=40&md5=164f44ff8124b8a2f961cfba2fd1bf9bapplication/pdf965870 bytesapplication/pdfen-USInfluence of the mask magnification on imaging in hyper-NA lithographyjournal article10.1364/JOSAA.24.0016332-s2.0-34447253310http://ntur.lib.ntu.edu.tw/bitstream/246246/95628/1/30.pdf