High-speed microlithography aerial image simulation without four-dimensional singular-value decomposition

CHUNG-PING CHEN2020-06-112020-06-112008https://scholars.lib.ntu.edu.tw/handle/123456789/501077High-speed microlithography aerial image simulation without four-dimensional singular-value decompositionconference paper10.1117/12.7740482-s2.0-45449095691https://www.scopus.com/inward/record.uri?eid=2-s2.0-45449095691&doi=10.1117%2f12.774048&partnerID=40&md5=babbbb756d66e0867160df531ddbcdc9