Fabrication of silicon thin film by metal-assisted chemical etching

Yang, S.-T.S.-T.YangLiu, C.-T.C.-T.LiuThiyagu, S.S.ThiyaguHsueh, C.-C.C.-C.HsuehCHING-FUH LIN2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84919480777&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/387124Fabrication of silicon thin film by metal-assisted chemical etchingconference paper10.1109/NANO.2014.6967974