Origin of Boron Contamination of the Intrinsic Amorphous Silicon Hydrogen Alloys in Glow Discharge System

Tsai, H.-K.H.-K.TsaiTzeng, W.-J.W.-J.TzengSI-CHEN LEE2018-09-102018-09-101989http://www.scopus.com/inward/record.url?eid=2-s2.0-0024754066&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350521Origin of Boron Contamination of the Intrinsic Amorphous Silicon Hydrogen Alloys in Glow Discharge Systemjournal article10.1149/1.2096393