2014-06-012024-05-14https://scholars.lib.ntu.edu.tw/handle/123456789/661389摘要：本研究旨在開發低熱膨脹鎳鐵合金Invar36光機彈性雙足支撐結構(Bipod flexure)製程技術，針對光機支撐結構進行參數最佳化設計與分析，並實際進行製程優化加工與測試，以驗證製程技術可靠度及完整性。鎳鐵合金Invar36為鎳含量36 %的沃斯田鐵系鎳鐵合金，具有極低熱膨脹係數(1.5&#1093;10-6/℃)，常應用於海洋工程與航太零件尺寸須相對穩定之關鍵元件，以及光電半導體產業光機結構熱膨脹須相互匹配部位，如海洋環境遙測取像儀主反射鏡片光機結構、半導體曝光鏡頭反射鏡片光機結構等，皆採用鎳鐵合金Invar36作為基材，設計製造彈性雙足結構，用以支撐並保護重要之光學元件。但鎳鐵合金Invar36機械性質及物理特性與一般合金差異極大，其製造加工不易、且容易產生殘留應力及加工變形等問題，大幅限制鎳鐵合金Invar36的發展與應用。此外，實際應用於海洋環境遙測取像系統或半導體曝光設備之光學支撐結構，往往須經過最佳化參數設計與分析，才足以達到符合功能之需求，故「鎳鐵合金Invar36製程技術」與「光機彈性雙足支撐結構之設計與分析」，為目前製造加工及光機應用產業提升競爭力所急需待解決之課題。 本計畫從設計分析、製程加工及測試驗證等方向，全面探討鎳鐵合金Invar36彈性雙足支撐結構之設計、分析及製造，並致力於符合精密光學儀器所需之光學元件支撐結構研發，計畫目標非常明確且規劃相當完整，有相當高的機會可獲得重要研究成果與突破。整個計畫預計在一年內有效執行，上半年度主要針對光機彈性雙足支撐結構進行參數化設計與分析，利用有限元素法求得最佳化彈性雙足支撐結構，再依據分析所得參數進行初步成型加工，並以三次元量測儀進行加工精度覆驗；下半年度則利用電腦輔助製造技術優化鎳鐵合金雙足支撐結構加工製程，使結構加工變形量及殘留應力量達到最小化，並使用光學干涉儀量測驗證結果，以確認製程技術符合實際應用規格需求。未來計畫成功後將視產業應用成效，整合產學研共同開發更高附加價值之特殊光機結構元件。 <br> Abstract: This study aims to develop the technology of designing and manufacturing bipod flexure made of low thermal expansion alloy such as Invar36. These bipod flexures are usually applied to support optical components in precision instruments in order to isolate the optics from mechanical and thermal loads. A bipod flexure, which is the most common support type, is a combination of two blade flexures forming a bipod structure. The bipod flexure must be designed flexible enough to prevent optical component damages due to vibration and shock. Besides, the bipod flexure must be robust enough to withstand mechanical stress and strain. Invar36 is a high strength and low thermal expansion alloy that is often used for bipod flexure. However, Invar36 alloy is very not so easy for manufacturing because of the residual stress and deformation due to cutting or turning processing. Hence, an optimum design and analysis for bipod flexure using Invar36 alloy is crucial for optomechanical support structures and improving the optical performance. Optimum parameters for bipod flexure design, manufacturing processes, and corresponding test sequences for large optical component is to be investigated in the study.低熱膨脹合金雙足支撐結構low thermal expansion alloybipod flexure