Fabrication of nanoscale PtO<inf>x</inf>/PZT/PtO<inf>x</inf> capacitors by e-beam lithography and plasma etching with photoresist mask

Huang, C.-K.C.-K.HuangChen, Y.-H.Y.-H.ChenLiang, Y.-C.Y.-C.LiangWu, T.-B.T.-B.WuChen, H.-L.H.-L.ChenChao, W.-C.W.-C.ChaoHSUEN-LI CHEN2020-05-122020-05-122006https://scholars.lib.ntu.edu.tw/handle/123456789/491352Fabrication of nanoscale PtO<inf>x</inf>/PZT/PtO<inf>x</inf> capacitors by e-beam lithography and plasma etching with photoresist maskjournal article10.1149/1.21623392-s2.0-31044433043https://www.scopus.com/inward/record.uri?eid=2-s2.0-31044433043&doi=10.1149%2f1.2162339&partnerID=40&md5=3b017df6abdf23f9cd26193663956677