Fan, K.-C.K.-C.FanLee, C.-K.C.-K.LeeWang, A.-B.A.-B.WangAN-BANG WANG2020-05-142020-05-141996https://scholars.lib.ntu.edu.tw/handle/123456789/492798Precision Positioning Stage ( I ), NSC-report, NSC 85-2221-E002-051)report