臺灣大學: 光電工程學研究所蘇國棟林柏裕Lin, Po-YuPo-YuLin2013-03-272018-07-052013-03-272018-07-052010http://ntur.lib.ntu.edu.tw//handle/246246/253619調適光學(AO)是藉由減少迅速改變的光學畸變，進而改進光學系統表現的技術。 現今，它在天文、雷射物理、非線性光學、醫學、視覺和國防工業扮演了更加重要的角色。 我們展示了波前主動式控制結合了波前感測器和靠靜電力驅動的MEMS 可形變鏡面是一可能解決方案。 鏡面以polyimide薄膜為主要結構。波前感測器偵測到影像後，並以Zernike多項式描述其像差，接著可形變鏡面便改正其畸變的波前。我們在這份論文裡製造出一個大尺寸的MEMS 可形變鏡面，它包含了直徑為 20 mm的圓形可形變區域和67個六角驅動電極。 除此之外，我們使用商業軟件， Ansys，模擬元件在不同電極施加時的形變行為；為了不同的應用需求，我們以模擬結果提出了一些製作參數上微調的建議。當我們施加195伏特在67個電極上時，我們量測到最大的形變位移是39 um。 由於我們所製造的可形變薄膜較大也較薄，它的共振頻率落在8 Hz附近。其外，我們也談論一些可能改進元件特性的方式，並且，從我們的實驗結果，我們認為可形變鏡面在波前主動式控制的領域裡有好的潛力。Adaptive optics (AO) is a technology which improves the performance of optical systems by reducing the effects of rapidly changing optical distortion. Nowadays, it makes more important role in astronomy, laser physics, nonlinear optics, medicine, vision and defense industry. We demonstrate that wave front active control by combining wave front sensor and MEMS deformable mirrors which made of polyimide thin film actuated by electrostatic force is one possible solution. Wave front sensor detects the image and aberration could be described with Zernike polynomials, and the distorted wave-front may be corrected by deformable mirror. In this thesis, we fabricate a large-scale MEMS deformable mirror with a 20mm diameter circular opening and 67 hexagonal actuation electrodes. Moreover, we use commercial software, Ansys, to simulate the deformation behavior of the membrane with different electrodes applied and give some device parameter tuning for versatile application. The maximum stoke is 39um as 195 volts applied to 67 electrodes. Due to the large-scale of our thin membrane, resonant frequency is around 8 Hz. Besides, we also discuss some possible ways to improve device characteristics and we think deformable mirror has a good potential for wave front active control based on our experiment results.140 bytestext/htmlen-US微機電系統可形變鏡面光波前主動式控制MEMSDeformable MirrorWave Front Active Controlthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/253619/1/index.html