MEMS Surface Coating Condition Monitoring via Nonlinear Tapping of Resoswitches

Lu, S.-C.S.-C.LuDu, W.-R.W.-R.DuHuang, Y.-C.Y.-C.HuangTsai, C.-P.C.-P.TsaiLi, W.-C.W.-C.LiWEI-CHANG LI2020-04-282020-04-282018https://scholars.lib.ntu.edu.tw/handle/123456789/486392MEMS Surface Coating Condition Monitoring via Nonlinear Tapping of Resoswitchesconference paper10.1109/FCS.2018.85975732-s2.0-85061835894https://www.scopus.com/inward/record.uri?eid=2-s2.0-85061835894&doi=10.1109%2fFCS.2018.8597573&partnerID=40&md5=160d445ea6222c1a1d2a3d10b90019e0