Double laser crystallization (DLC) of 50 nanometer and 20 nanometer amorphous silicon film forthin film transistors (TFTS) application

Xu, L.L.XuGrigoropoulos, C.P.C.P.GrigoropoulosLI XU2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-33645668259&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/318757Double laser crystallization (DLC) of 50 nanometer and 20 nanometer amorphous silicon film forthin film transistors (TFTS) applicationconference paper10.1115/IMECE2005-80475