Kuen-Yu TsaiSheng-Yung ChenKUEN-YU TSAI2018-09-102018-09-102014-08http://scholars.lib.ntu.edu.tw/handle/123456789/388673Method for Adjusting Status of Particle Beams for Patterning A Substrate and System Using the Same (於一基板上製作圖案時之粒子束狀態調整方法及其系統)patent